Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

• We started tracking this book on October 12, 2020.
• This book was £155.80 when we started tracking it.
• The price of this book has changed 8 times in the past 1,769 days.
• The current price of this book is £139.96 last checked 8 hours ago.
• This book is at its lowest price in the past 90 days.
• This lowest price this book has been offered at in the past year is £131.20.
• The lowest price to date was £131.20 last reached on February 25, 2022.
• This book has been £131.20 4 times since we started tracking it.
• The highest price to date was £155.80 last reached on December 25, 2020.
• This book has been £155.80 2 times since we started tracking it.

• Text-to-Speech: Enabled
• Lending: Disabled
• Print Length: 273 Pages
• File Size: 7,194 KB